Diagnostic Techniques for Semiconductor Materials Processing: Volume 406

Diagnostic Techniques for Semiconductor Materials Processing: Volume 406

Author: Stella W. Pang

Publisher:

Published: 1996-03-18

Total Pages: 616

ISBN-13:

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The fabrication of Si- and compound semiconductor-based devices involves a number of steps ranging from material growth to pattern definition by lithography, and ultimately, pattern transfer by etching/deposition. The key to device manufacturing, however, is reproducibility, low cost and high yield. Diagnostic techniques allow correlation between processing and actual device performance to be established. Researchers from universities, industry and government come together in this book to examine the advances in diagnostic techniques that provide critical information on structural, optical and electrical properties of semiconductor devices, as well as monitoring techniques for equipment/processes for control and feedback. The overriding goal is for rapid, accurate materials characterization, both in situ and ex situ. Topics include: in situ diagnostics; proximal probe microscopies; optical probes of devices and device properties; spectroscopic ellipsometry/structural diagnostics; and material analysis - X-ray techniques, strain measurements and passivation.


Book Synopsis Diagnostic Techniques for Semiconductor Materials Processing: Volume 406 by : Stella W. Pang

Download or read book Diagnostic Techniques for Semiconductor Materials Processing: Volume 406 written by Stella W. Pang and published by . This book was released on 1996-03-18 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of Si- and compound semiconductor-based devices involves a number of steps ranging from material growth to pattern definition by lithography, and ultimately, pattern transfer by etching/deposition. The key to device manufacturing, however, is reproducibility, low cost and high yield. Diagnostic techniques allow correlation between processing and actual device performance to be established. Researchers from universities, industry and government come together in this book to examine the advances in diagnostic techniques that provide critical information on structural, optical and electrical properties of semiconductor devices, as well as monitoring techniques for equipment/processes for control and feedback. The overriding goal is for rapid, accurate materials characterization, both in situ and ex situ. Topics include: in situ diagnostics; proximal probe microscopies; optical probes of devices and device properties; spectroscopic ellipsometry/structural diagnostics; and material analysis - X-ray techniques, strain measurements and passivation.


Diagnostic Techniques for Semiconductor Materials Processing

Diagnostic Techniques for Semiconductor Materials Processing

Author:

Publisher:

Published: 1996

Total Pages: 618

ISBN-13:

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Book Synopsis Diagnostic Techniques for Semiconductor Materials Processing by :

Download or read book Diagnostic Techniques for Semiconductor Materials Processing written by and published by . This book was released on 1996 with total page 618 pages. Available in PDF, EPUB and Kindle. Book excerpt:


Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7

Author: Dieter K. Schroder

Publisher: The Electrochemical Society

Published: 2007

Total Pages: 406

ISBN-13: 1566775698

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Diagnostic characterization techniques for semiconductor materials, devices and device processing are addressed at this symposium. It will cover new techniques as well as advances in routine analytical technology applied to semiconductor process development and manufacture. The hardcover edition includes a CD-ROM of ECS Transactions, Volume 10, Issue 1, Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007). The PDF edition also includes the ALTECH 2007 papers.


Book Synopsis Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7 by : Dieter K. Schroder

Download or read book Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7 written by Dieter K. Schroder and published by The Electrochemical Society. This book was released on 2007 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diagnostic characterization techniques for semiconductor materials, devices and device processing are addressed at this symposium. It will cover new techniques as well as advances in routine analytical technology applied to semiconductor process development and manufacture. The hardcover edition includes a CD-ROM of ECS Transactions, Volume 10, Issue 1, Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007). The PDF edition also includes the ALTECH 2007 papers.


Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes

Author: Bernd O. Kolbesen

Publisher: The Electrochemical Society

Published: 2003

Total Pages: 572

ISBN-13: 9781566773485

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.".. ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.


Book Synopsis Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes by : Bernd O. Kolbesen

Download or read book Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes written by Bernd O. Kolbesen and published by The Electrochemical Society. This book was released on 2003 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt: .".. ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.


Diagnostic Techniques for Semiconductor Materials Processing: Volume 324

Diagnostic Techniques for Semiconductor Materials Processing: Volume 324

Author: O. J. Glembocki

Publisher:

Published: 1994-07

Total Pages: 536

ISBN-13:

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.


Book Synopsis Diagnostic Techniques for Semiconductor Materials Processing: Volume 324 by : O. J. Glembocki

Download or read book Diagnostic Techniques for Semiconductor Materials Processing: Volume 324 written by O. J. Glembocki and published by . This book was released on 1994-07 with total page 536 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.


Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes

Author: Bernd O. Kolbesen (Chemiker.)

Publisher: The Electrochemical Society

Published: 1999

Total Pages: 568

ISBN-13: 9781566772396

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Book Synopsis Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes by : Bernd O. Kolbesen (Chemiker.)

Download or read book Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes written by Bernd O. Kolbesen (Chemiker.) and published by The Electrochemical Society. This book was released on 1999 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt:


Materials Reliability in Microelectronics VI: Volume 428

Materials Reliability in Microelectronics VI: Volume 428

Author: William F. Filter

Publisher:

Published: 1996-11-18

Total Pages: 616

ISBN-13:

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MRS books on materials reliability in microelectronics have become the snapshot of progress in this field. Reduced feature size, increased speed, and larger area are all factors contributing to the continual performance and functionality improvements in integrated circuit technology. These same factors place demands on the reliability of the individual components that make up the IC. Achieving increased reliability requires an improved understanding of both thin-film and patterned-feature materials properties and their degradation mechanisms, how materials and processes used to fabricate ICs interact, and how they may be tailored to enable reliability improvements. This book focuses on the physics and materials science of microelectronics reliability problems rather than the traditional statistical, accelerated electrical testing aspects. Studies are grouped into three large sections covering electromigration, gate oxide reliability and mechanical stress behavior. Topics include: historical summary; reliability issues for Cu metallization; characterization of electromigration phenomena; modelling; microstructural evolution and influences; oxide and device reliability; thin oxynitride dielectrics; noncontact diagnostics; stress effects in thin films and interconnects and microbeam X-ray techniques for stress measurements.


Book Synopsis Materials Reliability in Microelectronics VI: Volume 428 by : William F. Filter

Download or read book Materials Reliability in Microelectronics VI: Volume 428 written by William F. Filter and published by . This book was released on 1996-11-18 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: MRS books on materials reliability in microelectronics have become the snapshot of progress in this field. Reduced feature size, increased speed, and larger area are all factors contributing to the continual performance and functionality improvements in integrated circuit technology. These same factors place demands on the reliability of the individual components that make up the IC. Achieving increased reliability requires an improved understanding of both thin-film and patterned-feature materials properties and their degradation mechanisms, how materials and processes used to fabricate ICs interact, and how they may be tailored to enable reliability improvements. This book focuses on the physics and materials science of microelectronics reliability problems rather than the traditional statistical, accelerated electrical testing aspects. Studies are grouped into three large sections covering electromigration, gate oxide reliability and mechanical stress behavior. Topics include: historical summary; reliability issues for Cu metallization; characterization of electromigration phenomena; modelling; microstructural evolution and influences; oxide and device reliability; thin oxynitride dielectrics; noncontact diagnostics; stress effects in thin films and interconnects and microbeam X-ray techniques for stress measurements.


Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control

Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control

Author: G. M. Crean

Publisher:

Published: 1993

Total Pages:

ISBN-13:

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Book Synopsis Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control by : G. M. Crean

Download or read book Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control written by G. M. Crean and published by . This book was released on 1993 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:


Optoelectronic Materials: Volume 417

Optoelectronic Materials: Volume 417

Author: Eric D. Jones

Publisher:

Published: 1996-07-02

Total Pages: 450

ISBN-13:

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While the effects of spontaneous ordering or composition modulation on the properties of semiconductors and optoelectronic devices have been studied with great interest over the past several years, an understanding of the physics and chemistry of these two related phenomena is still in its infancy. This book brings together researchers from around the world to address issues concerning the physics, chemistry and growth parameters for spontaneous ordering and composition modulation. Developments in the use of artificial patterning to obtain new structured materials on a microscopic scale are featured. Advances in characterization techniques are also presented. Topics include: spontaneous ordering; self-assembled structures and quantum dots; self-organized epitaxial structures; composition modulation studies and optoelectronic materials.


Book Synopsis Optoelectronic Materials: Volume 417 by : Eric D. Jones

Download or read book Optoelectronic Materials: Volume 417 written by Eric D. Jones and published by . This book was released on 1996-07-02 with total page 450 pages. Available in PDF, EPUB and Kindle. Book excerpt: While the effects of spontaneous ordering or composition modulation on the properties of semiconductors and optoelectronic devices have been studied with great interest over the past several years, an understanding of the physics and chemistry of these two related phenomena is still in its infancy. This book brings together researchers from around the world to address issues concerning the physics, chemistry and growth parameters for spontaneous ordering and composition modulation. Developments in the use of artificial patterning to obtain new structured materials on a microscopic scale are featured. Advances in characterization techniques are also presented. Topics include: spontaneous ordering; self-assembled structures and quantum dots; self-organized epitaxial structures; composition modulation studies and optoelectronic materials.


Compound Semiconductor Electronics and Photonics: Volume 421

Compound Semiconductor Electronics and Photonics: Volume 421

Author: R. J. Shul

Publisher:

Published: 1996-10-14

Total Pages: 480

ISBN-13:

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III-V semiconductors have continued to find new applications in optical data transmission, full-color displays, automotive electronics and personal communication systems. Complex epitaxial growth, processing, device design and circuit architecture are all necessary for realization of these elements. This book brings together the diverse group of scientists and researchers that are required to develop the next-generation devices. The wide bandgap nitrides, GaN, AlN, InN and their alloys are featured. The commercial availability of blue- and green-light-emitting diodes based on the InGaN/AlGaN system, and the recent announcement of pulsed operation of a laser diode, have stimulated interest in the growth, characterization and processing of these materials. Potential applications in high-temperature/high-power electronics appear promising because of the good transport properties of these nitrides. Topics include: growth and characterization; photonics and processing; electronics and processing; wide bandgap semiconductors and novel devices and processing.


Book Synopsis Compound Semiconductor Electronics and Photonics: Volume 421 by : R. J. Shul

Download or read book Compound Semiconductor Electronics and Photonics: Volume 421 written by R. J. Shul and published by . This book was released on 1996-10-14 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: III-V semiconductors have continued to find new applications in optical data transmission, full-color displays, automotive electronics and personal communication systems. Complex epitaxial growth, processing, device design and circuit architecture are all necessary for realization of these elements. This book brings together the diverse group of scientists and researchers that are required to develop the next-generation devices. The wide bandgap nitrides, GaN, AlN, InN and their alloys are featured. The commercial availability of blue- and green-light-emitting diodes based on the InGaN/AlGaN system, and the recent announcement of pulsed operation of a laser diode, have stimulated interest in the growth, characterization and processing of these materials. Potential applications in high-temperature/high-power electronics appear promising because of the good transport properties of these nitrides. Topics include: growth and characterization; photonics and processing; electronics and processing; wide bandgap semiconductors and novel devices and processing.