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Efficient Extreme Ultra-Violet Mirror Design

Author: Yen-Min Lee

Publisher: IOP Publishing Limited

Published: 2021-09-23

Total Pages: 150

ISBN-13: 9780750326506

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Extreme ultraviolet (EUV) lithography is a next generation platform with the potential to extend Moore's Law. The EUV mirror is a fundamental component of this system. Efficient Extreme Ultraviolet Mirror Design describes an approach to designing EUV mirrors with reduced computational time and memory requirements, providing a comprehensive grounding in the fundamentals of the EUV mirror and knowledge of the finite-difference time-domain (FDTD) method. The discussion is made timely by the opening of commercial avenues for the application of EUV as it begins to be implemented in the development of 5G, AI, edge computing, VR and the Internet of Things. This book explores the theory, function and fabrication of EUV mirrors, as well as the correlation between design by Fresnel's equations and design by photonic bands, and develops a rigorous and efficient FDTD method by applying these considerations to three simulation cases. Intended primarily for EUV industry professionals, Efficient Extreme Ultraviolet Mirror Design will be of particular use to researchers investigating large scale problems or near-field scattering problems in EUV lithography. It will serve as an excellent reference text for anyone working in or studying optical engineering, as well as a high-level introduction for researchers from other fields interested in photolithography and the FDTD method. Key Features Addresses knowledge of extreme ultraviolet (EUV) mirrors and EUV lithography. Establishes a relation between photonic bands and Fresnel's equation. Introduces the high reflectivity EUV mirror design rules. Applies numerical simulation for EUV mirror design. Details efficient finite-difference time-domain (FDTD) approach.

Book Synopsis Efficient Extreme Ultra-Violet Mirror Design by : Yen-Min Lee

Download or read book Efficient Extreme Ultra-Violet Mirror Design written by Yen-Min Lee and published by IOP Publishing Limited. This book was released on 2021-09-23 with total page 150 pages. Available in PDF, EPUB and Kindle. Book excerpt: Extreme ultraviolet (EUV) lithography is a next generation platform with the potential to extend Moore's Law. The EUV mirror is a fundamental component of this system. Efficient Extreme Ultraviolet Mirror Design describes an approach to designing EUV mirrors with reduced computational time and memory requirements, providing a comprehensive grounding in the fundamentals of the EUV mirror and knowledge of the finite-difference time-domain (FDTD) method. The discussion is made timely by the opening of commercial avenues for the application of EUV as it begins to be implemented in the development of 5G, AI, edge computing, VR and the Internet of Things. This book explores the theory, function and fabrication of EUV mirrors, as well as the correlation between design by Fresnel's equations and design by photonic bands, and develops a rigorous and efficient FDTD method by applying these considerations to three simulation cases. Intended primarily for EUV industry professionals, Efficient Extreme Ultraviolet Mirror Design will be of particular use to researchers investigating large scale problems or near-field scattering problems in EUV lithography. It will serve as an excellent reference text for anyone working in or studying optical engineering, as well as a high-level introduction for researchers from other fields interested in photolithography and the FDTD method. Key Features Addresses knowledge of extreme ultraviolet (EUV) mirrors and EUV lithography. Establishes a relation between photonic bands and Fresnel's equation. Introduces the high reflectivity EUV mirror design rules. Applies numerical simulation for EUV mirror design. Details efficient finite-difference time-domain (FDTD) approach.

Optical Design

Author: Greggory Scranton

Publisher:

Published: 2017

Total Pages: 72

ISBN-13:

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As optics and photonics technologies advance, more energy efficient use of light will be necessary. This dissertation presents methods developed to enhance the efficiency of three different optical systems: extreme ultraviolet lithography, a hybrid solar photovoltaic/thermal collection system, and thermo-photovoltaics. Extreme ultraviolet (EUV) lithography is the leading contender to become the next industrial scale lithography technology in the semiconductor industry. Traditionally, aberration correction in extreme ultraviolet projection optics requires the use of multiple lossy mirrors, which results in prohibitively high source power requirements. This dissertation analyzes a single spherical mirror projection optical system where aberration correction is built into the mask itself through an adjoint-based optimization algorithm. This greatly reduces the power requirements for the source. Hybrid solar photovoltaic/thermal systems offer a way to convert sunlight into electricity and heat that efficiently uses different parts of the solar spectrum. Highly efficient hybrid solar photovoltaic/thermal systems are enabled by recent advances in photovoltaic technology. Record breaking photovoltaic cells have highly reflective rear mirrors to maximize luminescence efficiency. This reflectivity can also be used to create reflective optics to concentrate the reflected radiation onto a thermal absorber. This dissertation reports on a hybrid solar photovoltaic/thermal system with a thermal efficiency of 37% at a maximum absorber temperature of 365°C, and a direct solar to electric efficiency of 8%. Thermo-photovoltaics offers a method to use photovoltaic cells to efficiently convert heat to electricity. In a thermo-photovoltaic system, light is collected by photovoltaic cells from a local black body source. This dissertation reports on a thermo-photovoltaic device that recycles unused radiation from the photovoltaics with a highly reflective rear mirror. Theoretical efficiencies using this strategy are in excess of 50%. For an emitter temperature of 1207°C, this dissertation reports an experimental power conversion efficiency of 28.1%.

Book Synopsis Optical Design by : Greggory Scranton

Download or read book Optical Design written by Greggory Scranton and published by . This book was released on 2017 with total page 72 pages. Available in PDF, EPUB and Kindle. Book excerpt: As optics and photonics technologies advance, more energy efficient use of light will be necessary. This dissertation presents methods developed to enhance the efficiency of three different optical systems: extreme ultraviolet lithography, a hybrid solar photovoltaic/thermal collection system, and thermo-photovoltaics. Extreme ultraviolet (EUV) lithography is the leading contender to become the next industrial scale lithography technology in the semiconductor industry. Traditionally, aberration correction in extreme ultraviolet projection optics requires the use of multiple lossy mirrors, which results in prohibitively high source power requirements. This dissertation analyzes a single spherical mirror projection optical system where aberration correction is built into the mask itself through an adjoint-based optimization algorithm. This greatly reduces the power requirements for the source. Hybrid solar photovoltaic/thermal systems offer a way to convert sunlight into electricity and heat that efficiently uses different parts of the solar spectrum. Highly efficient hybrid solar photovoltaic/thermal systems are enabled by recent advances in photovoltaic technology. Record breaking photovoltaic cells have highly reflective rear mirrors to maximize luminescence efficiency. This reflectivity can also be used to create reflective optics to concentrate the reflected radiation onto a thermal absorber. This dissertation reports on a hybrid solar photovoltaic/thermal system with a thermal efficiency of 37% at a maximum absorber temperature of 365°C, and a direct solar to electric efficiency of 8%. Thermo-photovoltaics offers a method to use photovoltaic cells to efficiently convert heat to electricity. In a thermo-photovoltaic system, light is collected by photovoltaic cells from a local black body source. This dissertation reports on a thermo-photovoltaic device that recycles unused radiation from the photovoltaics with a highly reflective rear mirror. Theoretical efficiencies using this strategy are in excess of 50%. For an emitter temperature of 1207°C, this dissertation reports an experimental power conversion efficiency of 28.1%.

Extreme Ultraviolet Astronomy

Author: Martin A. Barstow

Publisher: Cambridge University Press

Published: 2003-03-13

Total Pages: 412

ISBN-13: 1139435124

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This book describes the development of astronomy in the Extreme Ultraviolet wavelength range, from the first rocket-based experiments to later satellite missions. It will be of great value to graduate students and researchers.

Book Synopsis Extreme Ultraviolet Astronomy by : Martin A. Barstow

Download or read book Extreme Ultraviolet Astronomy written by Martin A. Barstow and published by Cambridge University Press. This book was released on 2003-03-13 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the development of astronomy in the Extreme Ultraviolet wavelength range, from the first rocket-based experiments to later satellite missions. It will be of great value to graduate students and researchers.

Design, Fabrication, and Characterization of Multilayer Mirrors for Extreme Ultra-Violet Lithography

Author:

Publisher:

Published: 2013

Total Pages:

ISBN-13:

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Book Synopsis Design, Fabrication, and Characterization of Multilayer Mirrors for Extreme Ultra-Violet Lithography by :

Download or read book Design, Fabrication, and Characterization of Multilayer Mirrors for Extreme Ultra-Violet Lithography written by and published by . This book was released on 2013 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Extreme Ultraviolet Astronomy

Author: Roger F. Malina

Publisher: Elsevier

Published: 2013-10-22

Total Pages: 533

ISBN-13: 1483287181

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The field of extreme ultraviolet astronomy will see two major satellite observatories to be launched in 1991, one by ESA (ROSAT mission), one by NASA (EUVE mission). These Proceedings discuss the potential for EUV Astronomy, results from recent missions, approved and possible future missions and new developments in EUV technology.

Book Synopsis Extreme Ultraviolet Astronomy by : Roger F. Malina

Download or read book Extreme Ultraviolet Astronomy written by Roger F. Malina and published by Elsevier. This book was released on 2013-10-22 with total page 533 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of extreme ultraviolet astronomy will see two major satellite observatories to be launched in 1991, one by ESA (ROSAT mission), one by NASA (EUVE mission). These Proceedings discuss the potential for EUV Astronomy, results from recent missions, approved and possible future missions and new developments in EUV technology.

Extreme Ultraviolet Explorer

Author: Stephen P. Maran

Publisher:

Published: 1990

Total Pages: 28

ISBN-13:

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Book Synopsis Extreme Ultraviolet Explorer by : Stephen P. Maran

Download or read book Extreme Ultraviolet Explorer written by Stephen P. Maran and published by . This book was released on 1990 with total page 28 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Multifacet, Metal Mirror Design for Extreme-Ultraviolet and Soft X-Ray Free-Electron Laser Resonators

Author: BE. Newnam

Publisher:

Published: 1988

Total Pages: 9

ISBN-13:

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Resonator mirrors with reflectance greater than ~40% are required if free-electron laser (FEL) oscillators are to be extended to wavelengths below 100 nm. The principle of total-external reflection has been used to design multifacet mirrors of several metal films that surpass this requirement between 10 and 100 nm. These reflectors have high reflectance over a relatively broad band which suits well the inherent FEL wavelength tunability. The practical limitations to achieving and maintaining high reflectance include oxide- and carbon-contamination, scattering, and surface-plasmon absorption.

Book Synopsis Multifacet, Metal Mirror Design for Extreme-Ultraviolet and Soft X-Ray Free-Electron Laser Resonators by : BE. Newnam

Download or read book Multifacet, Metal Mirror Design for Extreme-Ultraviolet and Soft X-Ray Free-Electron Laser Resonators written by BE. Newnam and published by . This book was released on 1988 with total page 9 pages. Available in PDF, EPUB and Kindle. Book excerpt: Resonator mirrors with reflectance greater than ~40% are required if free-electron laser (FEL) oscillators are to be extended to wavelengths below 100 nm. The principle of total-external reflection has been used to design multifacet mirrors of several metal films that surpass this requirement between 10 and 100 nm. These reflectors have high reflectance over a relatively broad band which suits well the inherent FEL wavelength tunability. The practical limitations to achieving and maintaining high reflectance include oxide- and carbon-contamination, scattering, and surface-plasmon absorption.

Optical Technologies for Extreme-Ultraviolet and Soft X-ray Coherent Sources

Author: Federico Canova

Publisher: Springer

Published: 2015-08-17

Total Pages: 205

ISBN-13: 3662474433

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The book reviews the most recent achievements in optical technologies for XUV and X-ray coherent sources. Particular attention is given to free-electron-laser facilities, but also to other sources available at present, such as synchrotrons, high-order laser harmonics and X-ray lasers. The optical technologies relevant to each type of source are discussed. In addition, the main technologies used for photon handling and conditioning, namely multilayer mirrors, adaptive optics, crystals and gratings are explained. Experiments using coherent light received during the last decades a lot of attention for the X-ray regime. Strong efforts were taken for the realization of almost fully coherent sources, e.g. the free-electron lasers, both as independent sources in the femtosecond and attosecond regimes and as seeding sources for free-electron-lasers and X-ray gas lasers. In parallel to the development of sources, optical technologies for photon handling and conditioning of such coherent and intense X-ray beams advanced. New problems were faced for the realization of optical components of beamlines demanding to manage coherent X-ray photons, e.g. the preservation of coherence and time structure of ultra short pulses.

Book Synopsis Optical Technologies for Extreme-Ultraviolet and Soft X-ray Coherent Sources by : Federico Canova

Download or read book Optical Technologies for Extreme-Ultraviolet and Soft X-ray Coherent Sources written by Federico Canova and published by Springer. This book was released on 2015-08-17 with total page 205 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book reviews the most recent achievements in optical technologies for XUV and X-ray coherent sources. Particular attention is given to free-electron-laser facilities, but also to other sources available at present, such as synchrotrons, high-order laser harmonics and X-ray lasers. The optical technologies relevant to each type of source are discussed. In addition, the main technologies used for photon handling and conditioning, namely multilayer mirrors, adaptive optics, crystals and gratings are explained. Experiments using coherent light received during the last decades a lot of attention for the X-ray regime. Strong efforts were taken for the realization of almost fully coherent sources, e.g. the free-electron lasers, both as independent sources in the femtosecond and attosecond regimes and as seeding sources for free-electron-lasers and X-ray gas lasers. In parallel to the development of sources, optical technologies for photon handling and conditioning of such coherent and intense X-ray beams advanced. New problems were faced for the realization of optical components of beamlines demanding to manage coherent X-ray photons, e.g. the preservation of coherence and time structure of ultra short pulses.

Ultraviolet, Visible, and Gravity Astrophysics

Author:

Publisher:

Published: 1992

Total Pages: 84

ISBN-13:

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Book Synopsis Ultraviolet, Visible, and Gravity Astrophysics by :

Download or read book Ultraviolet, Visible, and Gravity Astrophysics written by and published by . This book was released on 1992 with total page 84 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Multifacet, Metal Mirror Design for Extreme-ultraviolet and Soft X-ray Free-electron Laser Resonators

Author:

Publisher:

Published: 1986

Total Pages:

ISBN-13:

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Resonator mirrors with reflectance greater than approx. 40% are required if free-electron laser (FEL) oscillators are to be extended to wavelengths below 100 nm. The principle of total-external reflection has been used to design multifacet mirrors of several metal films that surpass this requirement between 10 and 100 nm. These reflectors have high reflectance over a relatively broad band which suits well the inherent FEL wavelength tunability. The practical limitations to achieving and maintaining high reflectance include oxide- and carbon-contamination, scattering, and surface-plasmon absorption.

Book Synopsis Multifacet, Metal Mirror Design for Extreme-ultraviolet and Soft X-ray Free-electron Laser Resonators by :

Download or read book Multifacet, Metal Mirror Design for Extreme-ultraviolet and Soft X-ray Free-electron Laser Resonators written by and published by . This book was released on 1986 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Resonator mirrors with reflectance greater than approx. 40% are required if free-electron laser (FEL) oscillators are to be extended to wavelengths below 100 nm. The principle of total-external reflection has been used to design multifacet mirrors of several metal films that surpass this requirement between 10 and 100 nm. These reflectors have high reflectance over a relatively broad band which suits well the inherent FEL wavelength tunability. The practical limitations to achieving and maintaining high reflectance include oxide- and carbon-contamination, scattering, and surface-plasmon absorption.