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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication.
Book Synopsis Fabrication Engineering at the Micro and Nanoscale by : Stephen A. Campbell
Download or read book Fabrication Engineering at the Micro and Nanoscale written by Stephen A. Campbell and published by OUP USA. This book was released on 2008-01-10 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication.
The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, nonoptical lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The book also makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest.
Book Synopsis The Science and Engineering of Microelectronic Fabrication by : Stephen A. Campbell
Download or read book The Science and Engineering of Microelectronic Fabrication written by Stephen A. Campbell and published by Oxford University Press, USA. This book was released on 1996 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, nonoptical lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The book also makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest.
Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.
Book Synopsis Microfabrication and Nanomanufacturing by : Mark J. Jackson
Download or read book Microfabrication and Nanomanufacturing written by Mark J. Jackson and published by CRC Press. This book was released on 2005-11-10 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.
In the education area, Professor Campbell leads the University of Minnesota's participation in Nano-Link, an NSF sponsored regional center for nanotechnology education at the AAS level. He has designed and implemented a one-semester capstone experience Microelectronic Fabrication and created the text book as a result. Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, this fourthedition of Fabrication Engineering at the Micro- and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. The text covers the entire basic unitprocesses used to fabricate integrated circuits and other devices.
Book Synopsis Fabrication Engineer by : Stephen Campbell
Download or read book Fabrication Engineer written by Stephen Campbell and published by . This book was released on 2012-11-29 with total page 82 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the education area, Professor Campbell leads the University of Minnesota's participation in Nano-Link, an NSF sponsored regional center for nanotechnology education at the AAS level. He has designed and implemented a one-semester capstone experience Microelectronic Fabrication and created the text book as a result. Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, this fourthedition of Fabrication Engineering at the Micro- and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. The text covers the entire basic unitprocesses used to fabricate integrated circuits and other devices.
Download or read book Nanofabrication written by and published by . This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
This book presents a comprehensive treatment of both functional and decorative textiles used in the automotive industry including seat covers, headliners, airbags, seat belts and tyres. Written in a clear, concise style it explains material properties and the way in which they influence manufacturing processes as well as providing practical production details. The subject treatment cuts across the disciplines of textile chemistry, fabric and plastics technology and production engineering. Environmental effects and recycling are also covered. It is aimed at the design and process engineer in industry as well as researchers in universities and colleges. Quality engineers will also benefit from the book's sections on identifying problems and material limitations.
Book Synopsis Textiles in Automotive Engineering by : W Fung
Download or read book Textiles in Automotive Engineering written by W Fung and published by Elsevier. This book was released on 2000-11-28 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a comprehensive treatment of both functional and decorative textiles used in the automotive industry including seat covers, headliners, airbags, seat belts and tyres. Written in a clear, concise style it explains material properties and the way in which they influence manufacturing processes as well as providing practical production details. The subject treatment cuts across the disciplines of textile chemistry, fabric and plastics technology and production engineering. Environmental effects and recycling are also covered. It is aimed at the design and process engineer in industry as well as researchers in universities and colleges. Quality engineers will also benefit from the book's sections on identifying problems and material limitations.
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Book Synopsis Nanofabrication by : Maria Stepanova
Download or read book Nanofabrication written by Maria Stepanova and published by Springer Science & Business Media. This book was released on 2011-11-08 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Lab-on-a-chip devices for point of care diagnostics have been present in clinics for several years now. Alongside their continual development, research is underway to bring the organs and tissue on-a-chip to the patient, amongst other medical applications of microfluidics. This book provides the reader with a comprehensive review of the latest developments in the application of microfluidics to medicine and is divided into three main sections. The first part of the book discusses the state-of-the-art in organs and tissue on a chip; the second provides a thorough background to microfluidics for medicine, and the third (and largest) section provides numerous examples of point-of-care diagnostics. Written with students and practitioners in mind, and with contributions from the leaders in the field across the globe, this book provides a complete digest of the state-of-the-art in microfluidics medical devices and will provide a handy resource for any laboratory or clinic involved in the development or application of such devices.
Book Synopsis Microfluidics for Medical Applications by : Albert van den Berg
Download or read book Microfluidics for Medical Applications written by Albert van den Berg and published by Royal Society of Chemistry. This book was released on 2014-11-19 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lab-on-a-chip devices for point of care diagnostics have been present in clinics for several years now. Alongside their continual development, research is underway to bring the organs and tissue on-a-chip to the patient, amongst other medical applications of microfluidics. This book provides the reader with a comprehensive review of the latest developments in the application of microfluidics to medicine and is divided into three main sections. The first part of the book discusses the state-of-the-art in organs and tissue on a chip; the second provides a thorough background to microfluidics for medicine, and the third (and largest) section provides numerous examples of point-of-care diagnostics. Written with students and practitioners in mind, and with contributions from the leaders in the field across the globe, this book provides a complete digest of the state-of-the-art in microfluidics medical devices and will provide a handy resource for any laboratory or clinic involved in the development or application of such devices.
Microfabrication and precision engineering is an increasingly important area relating to metallic, polymers, ceramics, composites, biomaterials and complex materials. Micro-electro-mechanical-systems (MEMS) emphasize miniaturization in both electronic and mechanical components. Microsystem products may be classified by application, and have been applied to a variety of fields, including medical, automotive, aerospace and alternative energy. Microsystems technology refers to the products as well as the fabrication technologies used in production. With detailed information on modelling of micro and nano-scale cutting, as well as innovative machining strategies involved in microelectrochemical applications, microchannel fabrication, as well as underwater pulsed Laser beam cutting, among other techniques, Microfabrication and Precision Engineering is a valuable reference for students, researchers and professionals in the microfabrication and precision engineering fields. Contains contributions by top industry experts Includes the latest techniques and strategies Special emphasis given to state-of-the art research and development in microfabrication and precision engineering
Book Synopsis Microfabrication and Precision Engineering by : J Paulo Davim
Download or read book Microfabrication and Precision Engineering written by J Paulo Davim and published by Woodhead Publishing. This book was released on 2017-01-15 with total page 286 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabrication and precision engineering is an increasingly important area relating to metallic, polymers, ceramics, composites, biomaterials and complex materials. Micro-electro-mechanical-systems (MEMS) emphasize miniaturization in both electronic and mechanical components. Microsystem products may be classified by application, and have been applied to a variety of fields, including medical, automotive, aerospace and alternative energy. Microsystems technology refers to the products as well as the fabrication technologies used in production. With detailed information on modelling of micro and nano-scale cutting, as well as innovative machining strategies involved in microelectrochemical applications, microchannel fabrication, as well as underwater pulsed Laser beam cutting, among other techniques, Microfabrication and Precision Engineering is a valuable reference for students, researchers and professionals in the microfabrication and precision engineering fields. Contains contributions by top industry experts Includes the latest techniques and strategies Special emphasis given to state-of-the art research and development in microfabrication and precision engineering
Self-assembly of Nano- and Micro-structured Materials Using Colloidal Engineering, Volume 12, covers the recent breakthroughs in the design and manufacture of functional colloids at the micro- and nanoscale level. In addition, it provides analyses on how these functionalities can be exploited to develop self-assembly pathways towards nano- and micro-structured materials. As we seek increasingly complex functions for colloidal superstructures, in silico design will play a critical role in guiding experimental fabrication by reducing the element of trial-and-error that would otherwise be involved. In addition to novel experimental approaches, recent developments in computational modelling are also presented, along with an overview of the arsenal of designing tools that are available to the modern materials scientist. Focuses on promoting feedback between experiment, theory and computation in this cross-disciplinary research area Shows how colloid science plays a crucial role in the bottom-up fabrication of nanostructured materials Presents recent developments in computational modelling
Book Synopsis Self-Assembly of Nano- and Micro-structured Materials Using Colloidal Engineering by : Dwaipayan Chakrabarti
Download or read book Self-Assembly of Nano- and Micro-structured Materials Using Colloidal Engineering written by Dwaipayan Chakrabarti and published by Elsevier. This book was released on 2019-04-25 with total page 184 pages. Available in PDF, EPUB and Kindle. Book excerpt: Self-assembly of Nano- and Micro-structured Materials Using Colloidal Engineering, Volume 12, covers the recent breakthroughs in the design and manufacture of functional colloids at the micro- and nanoscale level. In addition, it provides analyses on how these functionalities can be exploited to develop self-assembly pathways towards nano- and micro-structured materials. As we seek increasingly complex functions for colloidal superstructures, in silico design will play a critical role in guiding experimental fabrication by reducing the element of trial-and-error that would otherwise be involved. In addition to novel experimental approaches, recent developments in computational modelling are also presented, along with an overview of the arsenal of designing tools that are available to the modern materials scientist. Focuses on promoting feedback between experiment, theory and computation in this cross-disciplinary research area Shows how colloid science plays a crucial role in the bottom-up fabrication of nanostructured materials Presents recent developments in computational modelling
