High Dielectric Constant Materials

High Dielectric Constant Materials

Author: Howard Huff

Publisher: Springer Science & Business Media

Published: 2005

Total Pages: 740

ISBN-13: 9783540210818

DOWNLOAD EBOOK

Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology. Topics include: an extensive review of Moore's Law, the classical regime for SiO2 gate dielectrics; the transition to silicon oxynitride gate dielectrics; the transition to high-K gate dielectrics (including the drive towards equivalent oxide thickness in the single-digit nanometer regime); and future directions and issues for ultimate technology generation scaling. The vision, wisdom, and experience of the team of authors will make this book a timely, relevant, and interesting, resource focusing on fundamentals of the 45 nm Technology Generation and beyond.


Book Synopsis High Dielectric Constant Materials by : Howard Huff

Download or read book High Dielectric Constant Materials written by Howard Huff and published by Springer Science & Business Media. This book was released on 2005 with total page 740 pages. Available in PDF, EPUB and Kindle. Book excerpt: Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology. Topics include: an extensive review of Moore's Law, the classical regime for SiO2 gate dielectrics; the transition to silicon oxynitride gate dielectrics; the transition to high-K gate dielectrics (including the drive towards equivalent oxide thickness in the single-digit nanometer regime); and future directions and issues for ultimate technology generation scaling. The vision, wisdom, and experience of the team of authors will make this book a timely, relevant, and interesting, resource focusing on fundamentals of the 45 nm Technology Generation and beyond.


Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set

Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set

Author: Hari Singh Nalwa

Publisher: Elsevier

Published: 1999-09-07

Total Pages: 562

ISBN-13: 0080533531

DOWNLOAD EBOOK

Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They will play a crucial role in the future generation of IC devices (VLSI/UISI and high speed IC packaging). Considerable efforts have been made to develop new low as well as high dielectric constant materials for applications in electronics industries. Besides achieving either low or high dielectric constants, other materials' properties such as good processability, high mechanical strength, high thermal and environmental stability, low thermal expansion, low current leakage, low moisture absorption, corrosion resistant, etc., are of equal importance. Many chemical and physical strategies have been employed to get desired dielectric materials with high performance. This is a rapidly growing field of science--both in novel materials and their applications to future packing technologies. The experimental data on inorganic and organic materials having low or high dielectric constant remail scattered in the literature. It is timely, therfore, to consolidate the current knowledge on low and high dielectric constant materials into a sigle reference source. Handbook of Low and High Dielectric Constant Materials and Their Applications is aimed at bringing together under a sigle cover (in two volumes) all low and high dielectric constant materials currently studied in academic and industrial research covering all spects of inorgani an organic materials from their synthetic chemistry, processing techniques, physics, structure-property relationship to applications in IC devices. This book will summarize the current status of the field covering important scientific developments made over the past decade with contributions from internationally recognized experts from all over the world. Fully cross-referenced, this book has clear, precise, and wide appeal as an essential reference source for all those interested in low and high dielectric constant material.


Book Synopsis Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set by : Hari Singh Nalwa

Download or read book Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set written by Hari Singh Nalwa and published by Elsevier. This book was released on 1999-09-07 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They will play a crucial role in the future generation of IC devices (VLSI/UISI and high speed IC packaging). Considerable efforts have been made to develop new low as well as high dielectric constant materials for applications in electronics industries. Besides achieving either low or high dielectric constants, other materials' properties such as good processability, high mechanical strength, high thermal and environmental stability, low thermal expansion, low current leakage, low moisture absorption, corrosion resistant, etc., are of equal importance. Many chemical and physical strategies have been employed to get desired dielectric materials with high performance. This is a rapidly growing field of science--both in novel materials and their applications to future packing technologies. The experimental data on inorganic and organic materials having low or high dielectric constant remail scattered in the literature. It is timely, therfore, to consolidate the current knowledge on low and high dielectric constant materials into a sigle reference source. Handbook of Low and High Dielectric Constant Materials and Their Applications is aimed at bringing together under a sigle cover (in two volumes) all low and high dielectric constant materials currently studied in academic and industrial research covering all spects of inorgani an organic materials from their synthetic chemistry, processing techniques, physics, structure-property relationship to applications in IC devices. This book will summarize the current status of the field covering important scientific developments made over the past decade with contributions from internationally recognized experts from all over the world. Fully cross-referenced, this book has clear, precise, and wide appeal as an essential reference source for all those interested in low and high dielectric constant material.


Low and High Dielectric Constant Materials

Low and High Dielectric Constant Materials

Author: Mark J. Lododa

Publisher: The Electrochemical Society

Published: 2000

Total Pages: 262

ISBN-13: 9781566772709

DOWNLOAD EBOOK

Contains papers from a May 2000 symposium, representing the state of the art in areas of dielectric materials science and process integration. Papers are arranged in sections on low and high dielectric constant materials, covering topics such as ammonia plasma passivation effects on properties of post-CMP low-k HSQ, characterization of ashing effects on low-k dielectric films, and electron beam curing of thin film polymer dielectrics. Other subjects include characterization of high-k dielectrics using the non-contact surface charge profiler method, and processing effects and electrical evaluation of ZrO2 formed by RTP oxidation of Zr. Loboda is affiliated with Dow Corning Corporation. c. Book News Inc.


Book Synopsis Low and High Dielectric Constant Materials by : Mark J. Lododa

Download or read book Low and High Dielectric Constant Materials written by Mark J. Lododa and published by The Electrochemical Society. This book was released on 2000 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: Contains papers from a May 2000 symposium, representing the state of the art in areas of dielectric materials science and process integration. Papers are arranged in sections on low and high dielectric constant materials, covering topics such as ammonia plasma passivation effects on properties of post-CMP low-k HSQ, characterization of ashing effects on low-k dielectric films, and electron beam curing of thin film polymer dielectrics. Other subjects include characterization of high-k dielectrics using the non-contact surface charge profiler method, and processing effects and electrical evaluation of ZrO2 formed by RTP oxidation of Zr. Loboda is affiliated with Dow Corning Corporation. c. Book News Inc.


Low and High Dielectric Constant Materials

Low and High Dielectric Constant Materials

Author: Rajendra Singh

Publisher: The Electrochemical Society

Published: 2000

Total Pages: 242

ISBN-13: 9781566772297

DOWNLOAD EBOOK


Book Synopsis Low and High Dielectric Constant Materials by : Rajendra Singh

Download or read book Low and High Dielectric Constant Materials written by Rajendra Singh and published by The Electrochemical Society. This book was released on 2000 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt:


Handbook of Low and High Dielectric Constant Materials and Their Applications: Materials and processing

Handbook of Low and High Dielectric Constant Materials and Their Applications: Materials and processing

Author: Hari Singh Nalwa

Publisher:

Published: 1999

Total Pages: 600

ISBN-13:

DOWNLOAD EBOOK


Book Synopsis Handbook of Low and High Dielectric Constant Materials and Their Applications: Materials and processing by : Hari Singh Nalwa

Download or read book Handbook of Low and High Dielectric Constant Materials and Their Applications: Materials and processing written by Hari Singh Nalwa and published by . This book was released on 1999 with total page 600 pages. Available in PDF, EPUB and Kindle. Book excerpt:


Low Dielectric Constant Materials for IC Applications

Low Dielectric Constant Materials for IC Applications

Author: Paul S. Ho

Publisher: Springer Science & Business Media

Published: 2003

Total Pages: 340

ISBN-13: 9783540678199

DOWNLOAD EBOOK

Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for


Book Synopsis Low Dielectric Constant Materials for IC Applications by : Paul S. Ho

Download or read book Low Dielectric Constant Materials for IC Applications written by Paul S. Ho and published by Springer Science & Business Media. This book was released on 2003 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for


Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set

Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set

Author: Hari Singh Nalwa

Publisher:

Published: 1999

Total Pages:

ISBN-13:

DOWNLOAD EBOOK


Book Synopsis Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set by : Hari Singh Nalwa

Download or read book Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set written by Hari Singh Nalwa and published by . This book was released on 1999 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:


Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials

Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials

Author: Hazara S. Rathore

Publisher: The Electrochemical Society

Published: 1997

Total Pages: 278

ISBN-13: 9781566771351

DOWNLOAD EBOOK


Book Synopsis Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials by : Hazara S. Rathore

Download or read book Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials written by Hazara S. Rathore and published by The Electrochemical Society. This book was released on 1997 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt:


Handbook of Low and High Dielectric Constant Materials and Their Applications: Materials and processing

Handbook of Low and High Dielectric Constant Materials and Their Applications: Materials and processing

Author: Hari Singh Nalwa

Publisher:

Published: 1999

Total Pages:

ISBN-13:

DOWNLOAD EBOOK


Book Synopsis Handbook of Low and High Dielectric Constant Materials and Their Applications: Materials and processing by : Hari Singh Nalwa

Download or read book Handbook of Low and High Dielectric Constant Materials and Their Applications: Materials and processing written by Hari Singh Nalwa and published by . This book was released on 1999 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:


Low-dielectric Constant Materials

Low-dielectric Constant Materials

Author:

Publisher:

Published: 1998

Total Pages: 408

ISBN-13:

DOWNLOAD EBOOK


Book Synopsis Low-dielectric Constant Materials by :

Download or read book Low-dielectric Constant Materials written by and published by . This book was released on 1998 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: