Micro and Nano Fabrication

Micro and Nano Fabrication

Author: Hans H. Gatzen

Publisher: Springer

Published: 2015-01-02

Total Pages: 537

ISBN-13: 3662443953

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.


Book Synopsis Micro and Nano Fabrication by : Hans H. Gatzen

Download or read book Micro and Nano Fabrication written by Hans H. Gatzen and published by Springer. This book was released on 2015-01-02 with total page 537 pages. Available in PDF, EPUB and Kindle. Book excerpt: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Micro and Nano Fabrication Technology

Micro and Nano Fabrication Technology

Author: Jiwang Yan

Publisher: Springer

Published: 2018-07-16

Total Pages: 0

ISBN-13: 9789811300974

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This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.


Book Synopsis Micro and Nano Fabrication Technology by : Jiwang Yan

Download or read book Micro and Nano Fabrication Technology written by Jiwang Yan and published by Springer. This book was released on 2018-07-16 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.

Bionic Functional Structures by Femtosecond Laser Micro/nanofabrication Technologies

Bionic Functional Structures by Femtosecond Laser Micro/nanofabrication Technologies

Author: Guoqiang Li

Publisher: Springer

Published: 2018-05-15

Total Pages: 128

ISBN-13: 9811303592

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This thesis combines advanced femtosecond laser micro/nanofabrication technologies and frontier bionic design principles to prepare diverse biomimetic micro/nanostructures to realize their functions. By studying the formation mechanism of the micro/nanostructures, the author identifies various artificial structural colors, three-dimensional micro/nanocage arrays, and fish-scale inspired microcone arrays in different processing environments. Multiple functions such as enhanced antireflection, hydrophobicity, and underwater superoleophobicity are achieved by precisely adjusting laser-machining parameters. This novel design and method have extensive potential applications in the context of new colorizing technologies, microfluidics, microsensors, and biomedicine.


Book Synopsis Bionic Functional Structures by Femtosecond Laser Micro/nanofabrication Technologies by : Guoqiang Li

Download or read book Bionic Functional Structures by Femtosecond Laser Micro/nanofabrication Technologies written by Guoqiang Li and published by Springer. This book was released on 2018-05-15 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis combines advanced femtosecond laser micro/nanofabrication technologies and frontier bionic design principles to prepare diverse biomimetic micro/nanostructures to realize their functions. By studying the formation mechanism of the micro/nanostructures, the author identifies various artificial structural colors, three-dimensional micro/nanocage arrays, and fish-scale inspired microcone arrays in different processing environments. Multiple functions such as enhanced antireflection, hydrophobicity, and underwater superoleophobicity are achieved by precisely adjusting laser-machining parameters. This novel design and method have extensive potential applications in the context of new colorizing technologies, microfluidics, microsensors, and biomedicine.

Micro- and Nanofabrication for Beginners

Micro- and Nanofabrication for Beginners

Author: Eiichi Kondoh

Publisher: CRC Press

Published: 2022-06-13

Total Pages: 239

ISBN-13: 100024640X

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In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of “using gases as a fabrication tool.” Unlike other books available on the subject, this volume assumes only entry-level mathematics, physics, and chemistry of undergraduates or high-school students in science and engineering courses. Necessary theories are plainly explained to help the reader learn about this new attractive field and enable further reading of specialized books. The book is an attractive guide for students, young engineers, and anyone getting involved in micro- and nanofabrication from various fields including physics, electronics, chemistry, and materials sciences.


Book Synopsis Micro- and Nanofabrication for Beginners by : Eiichi Kondoh

Download or read book Micro- and Nanofabrication for Beginners written by Eiichi Kondoh and published by CRC Press. This book was released on 2022-06-13 with total page 239 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of “using gases as a fabrication tool.” Unlike other books available on the subject, this volume assumes only entry-level mathematics, physics, and chemistry of undergraduates or high-school students in science and engineering courses. Necessary theories are plainly explained to help the reader learn about this new attractive field and enable further reading of specialized books. The book is an attractive guide for students, young engineers, and anyone getting involved in micro- and nanofabrication from various fields including physics, electronics, chemistry, and materials sciences.

Nanofabrication

Nanofabrication

Author: Zheng Cui

Publisher: Springer Science & Business Media

Published: 2009-01-01

Total Pages: 350

ISBN-13: 0387755772

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This book provides the reader with the most up-to-date information and development in the Nanofabrication area. It presents a one-stop description at the introduction level on most of the technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The book serves as a practical guide and first hand reference for those working in nanostructure fabrication.


Book Synopsis Nanofabrication by : Zheng Cui

Download or read book Nanofabrication written by Zheng Cui and published by Springer Science & Business Media. This book was released on 2009-01-01 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the reader with the most up-to-date information and development in the Nanofabrication area. It presents a one-stop description at the introduction level on most of the technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The book serves as a practical guide and first hand reference for those working in nanostructure fabrication.

Micro and Nanomanufacturing

Micro and Nanomanufacturing

Author: Mark J. Jackson

Publisher: Springer Science & Business Media

Published: 2007-06-19

Total Pages: 708

ISBN-13: 038726132X

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This, the corrected second printing of Jackson’s authoritative volume on the subject, provides a comprehensive treatment of established micro and nanofabrication techniques. It addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. The book provides up-to-date information on a number of subjects of interest to engineers who are seeking more knowledge of how nano and micro devices are designed and fabricated. They will learn about manufacturing and fabrication techniques at the micro and nanoscales; using bulk and surface micromachining techniques, and LiGA, and deep x-ray lithography to manufacture semiconductors. Also covered are subjects including producing master molds with micromachining, the deposition of thin films, pulsed water drop machining, and nanomachining.


Book Synopsis Micro and Nanomanufacturing by : Mark J. Jackson

Download or read book Micro and Nanomanufacturing written by Mark J. Jackson and published by Springer Science & Business Media. This book was released on 2007-06-19 with total page 708 pages. Available in PDF, EPUB and Kindle. Book excerpt: This, the corrected second printing of Jackson’s authoritative volume on the subject, provides a comprehensive treatment of established micro and nanofabrication techniques. It addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. The book provides up-to-date information on a number of subjects of interest to engineers who are seeking more knowledge of how nano and micro devices are designed and fabricated. They will learn about manufacturing and fabrication techniques at the micro and nanoscales; using bulk and surface micromachining techniques, and LiGA, and deep x-ray lithography to manufacture semiconductors. Also covered are subjects including producing master molds with micromachining, the deposition of thin films, pulsed water drop machining, and nanomachining.

Micro / Nano Replication

Micro / Nano Replication

Author: Shinill Kang

Publisher: John Wiley & Sons

Published: 2012-04-03

Total Pages: 384

ISBN-13: 0470392134

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An introduction to micro and nano replication processes and applications Micro/Nano Replication: Processes and Applications provides an overview of the fundamentals, processes, and applications involved in micro and nano replication in the manufacturing of product parts. A major field of nanotechnology, the study of micro/nano replication is sure to become one of increasing importance as the construction of completely new devices based on innovative concepts and crafted at the molecular level increases. Designed to help the reader understand and learn to work with the growing number of tools for molding plastic components, the book covers the key topics related to replication, including patterning technology, the modification of mold surface properties, and much more. In addition, it addresses the strengths and weaknesses of different molding processes. With a strong focus not only on how micro/nano replication works, but also the broader implications for the industry, the book is packed with examples of real world applications. These are drawn from a variety of fields, including information storage devices, optoelectronic elements, optical communication, and biosensors, in order to provide a complete view of the importance of micro and nano processes. A valuable introduction to a new but fast-growing field, Micro/Nano Replication is an essential resource for anyone looking to get a head start on understanding this emerging discipline.


Book Synopsis Micro / Nano Replication by : Shinill Kang

Download or read book Micro / Nano Replication written by Shinill Kang and published by John Wiley & Sons. This book was released on 2012-04-03 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: An introduction to micro and nano replication processes and applications Micro/Nano Replication: Processes and Applications provides an overview of the fundamentals, processes, and applications involved in micro and nano replication in the manufacturing of product parts. A major field of nanotechnology, the study of micro/nano replication is sure to become one of increasing importance as the construction of completely new devices based on innovative concepts and crafted at the molecular level increases. Designed to help the reader understand and learn to work with the growing number of tools for molding plastic components, the book covers the key topics related to replication, including patterning technology, the modification of mold surface properties, and much more. In addition, it addresses the strengths and weaknesses of different molding processes. With a strong focus not only on how micro/nano replication works, but also the broader implications for the industry, the book is packed with examples of real world applications. These are drawn from a variety of fields, including information storage devices, optoelectronic elements, optical communication, and biosensors, in order to provide a complete view of the importance of micro and nano processes. A valuable introduction to a new but fast-growing field, Micro/Nano Replication is an essential resource for anyone looking to get a head start on understanding this emerging discipline.

Micro and Nanomanufacturing Volume II

Micro and Nanomanufacturing Volume II

Author: Mark J. Jackson

Publisher: Springer

Published: 2017-10-28

Total Pages: 570

ISBN-13: 3319671324

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This book is a comprehensive treatment of micro and nanofabrication techniques, and applies established and research laboratory manufacturing techniques to a wide variety of materials. It is a companion volume to “Micro and Nanomanufacturing” (2007) and covers new topics such as aligned nanowire growth, molecular dynamics simulation of nanomaterials, atomic force microscopy for microbial cell surfaces, 3D printing of pharmaceuticals, microvascular coaptation methods, and more. The chapters also cover a wide variety of applications in areas such as surgery, auto components, living cell detection, dentistry, nanoparticles in medicine, and aerospace components. This is an ideal text for professionals working in the field, and for graduate students in micro and nanomanufacturing courses.


Book Synopsis Micro and Nanomanufacturing Volume II by : Mark J. Jackson

Download or read book Micro and Nanomanufacturing Volume II written by Mark J. Jackson and published by Springer. This book was released on 2017-10-28 with total page 570 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a comprehensive treatment of micro and nanofabrication techniques, and applies established and research laboratory manufacturing techniques to a wide variety of materials. It is a companion volume to “Micro and Nanomanufacturing” (2007) and covers new topics such as aligned nanowire growth, molecular dynamics simulation of nanomaterials, atomic force microscopy for microbial cell surfaces, 3D printing of pharmaceuticals, microvascular coaptation methods, and more. The chapters also cover a wide variety of applications in areas such as surgery, auto components, living cell detection, dentistry, nanoparticles in medicine, and aerospace components. This is an ideal text for professionals working in the field, and for graduate students in micro and nanomanufacturing courses.

Laser Micro-Nano-Manufacturing and 3D Microprinting

Laser Micro-Nano-Manufacturing and 3D Microprinting

Author: Anming Hu

Publisher: Springer Nature

Published: 2020-11-28

Total Pages: 360

ISBN-13: 3030593134

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This book provides a comprehensive overview of the latest advances in laser techniques for micro-nano-manufacturing and an in-depth analysis of applications, such as 3D printing and nanojoining. Lasers have gained increasing significance as a precise tool for advanced manufacturing. Written by world leading scientists, the first part of the book presents the fundamentals of laser interaction with materials at the micro- and nanoscale, including multiphoton excitation and nonthermal melting, and allows readers to better understand advanced processing. In the second part, the authors focus on various advanced fabrications, such as laser peening, surface nanoengineering, and plasmonic heating. Finally, case studies are devoted to special applications, such as 3D printing, microfluidics devices, energy devices, and plasmonic and photonic waveguides. This book integrates both theoretical and experimental analysis. The combination of tutorial chapters and concentrated case studies will be critically attractive to undergraduate and graduate students, researchers, and engineers in the relevant fields. Readers will grasp the full picture of the application of laser for micro-nanomanufacturing and 3D printing.


Book Synopsis Laser Micro-Nano-Manufacturing and 3D Microprinting by : Anming Hu

Download or read book Laser Micro-Nano-Manufacturing and 3D Microprinting written by Anming Hu and published by Springer Nature. This book was released on 2020-11-28 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive overview of the latest advances in laser techniques for micro-nano-manufacturing and an in-depth analysis of applications, such as 3D printing and nanojoining. Lasers have gained increasing significance as a precise tool for advanced manufacturing. Written by world leading scientists, the first part of the book presents the fundamentals of laser interaction with materials at the micro- and nanoscale, including multiphoton excitation and nonthermal melting, and allows readers to better understand advanced processing. In the second part, the authors focus on various advanced fabrications, such as laser peening, surface nanoengineering, and plasmonic heating. Finally, case studies are devoted to special applications, such as 3D printing, microfluidics devices, energy devices, and plasmonic and photonic waveguides. This book integrates both theoretical and experimental analysis. The combination of tutorial chapters and concentrated case studies will be critically attractive to undergraduate and graduate students, researchers, and engineers in the relevant fields. Readers will grasp the full picture of the application of laser for micro-nanomanufacturing and 3D printing.

Nano- and Microfabrication for Industrial and Biomedical Applications

Nano- and Microfabrication for Industrial and Biomedical Applications

Author: Regina Luttge

Publisher: William Andrew

Published: 2016-06-12

Total Pages: 278

ISBN-13: 0323389287

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Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems


Book Synopsis Nano- and Microfabrication for Industrial and Biomedical Applications by : Regina Luttge

Download or read book Nano- and Microfabrication for Industrial and Biomedical Applications written by Regina Luttge and published by William Andrew. This book was released on 2016-06-12 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems