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An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.
Book Synopsis Plasma-Surface Interactions and Processing of Materials by : O. Auciello
Download or read book Plasma-Surface Interactions and Processing of Materials written by O. Auciello and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.
Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Book Synopsis Plasma Processing of Materials by : National Research Council
Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
This book deals with the specific contact between the fourth state of matter, i.e. plasma, and the first state of matter, i.e. a solid wall, in controlled fusion experiments. A comprehensive analysis of the main processes of plasma-surface interaction is given together with an assessment of the most critical questions within the context of general criteria and operation limits. It also contains a survey on other important aspects in nuclear fusion.
Book Synopsis Plasma-Material Interaction in Controlled Fusion by : Dirk Naujoks
Download or read book Plasma-Material Interaction in Controlled Fusion written by Dirk Naujoks and published by Springer Science & Business Media. This book was released on 2006-08-25 with total page 279 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with the specific contact between the fourth state of matter, i.e. plasma, and the first state of matter, i.e. a solid wall, in controlled fusion experiments. A comprehensive analysis of the main processes of plasma-surface interaction is given together with an assessment of the most critical questions within the context of general criteria and operation limits. It also contains a survey on other important aspects in nuclear fusion.
NONTHERMAL PLASMAS FOR MATERIALS PROCESSING This unique book covers the physical and chemical aspects of plasma chemistry with polymers and gives new insights into the interaction of physics and chemistry of nonthermal plasmas and their applications in materials science for physicists and chemists. The properties and characteristics of plasmas, elementary (collision) processes in the gas phase, plasma surface interactions, gas discharge plasmas and technical plasma sources, atmospheric plasmas, plasma diagnostics, polymers and plasmas, plasma polymerization, post-plasma processes, plasma, and wet-chemical processing, plasma-induced generation of functional groups, and the chemical reactions on these groups along with a few exemplary applications are discussed in this comprehensive but condensed state-of-the-art book on plasma chemistry and its dependence on plasma physics. While plasma physics, plasma chemistry, and polymer science are often handled separately, the aim of the authors is to harmoniously join the physics and chemistry of low-pressure and atmospheric-pressure plasmas with polymer surface chemistry and polymerization and to compare such chemistry with classic chemistry. Readers will find in these chapters Interaction of plasma physics and chemistry in plasmas and at the surface of polymers; Explanation and interpretation of physical and chemical mechanisms on plasma polymerization and polymer surface modification; Introduction of modern techniques in plasma diagnostics, surface analysis of solids, and special behavior of polymers on exposure to plasmas; Discussion of the conflict of energy-rich plasma species with permanent energy supply and the much lower binding energies in polymers and alternatives to avoid random polymer decomposition Technical applications such as adhesion, cleaning, wettability, textile modification, coatings, films, etc. New perspectives are explained about how to use selective and mild processes to allow post-plasma chemistry on non-degraded polymer surfaces. Audience Physicists, polymer chemists, materials scientists, industrial engineers in biomedicine, coatings, printing, etc.
Book Synopsis Nonthermal Plasmas for Materials Processing by : Jörg Florian Friedrich
Download or read book Nonthermal Plasmas for Materials Processing written by Jörg Florian Friedrich and published by John Wiley & Sons. This book was released on 2022-07-15 with total page 805 pages. Available in PDF, EPUB and Kindle. Book excerpt: NONTHERMAL PLASMAS FOR MATERIALS PROCESSING This unique book covers the physical and chemical aspects of plasma chemistry with polymers and gives new insights into the interaction of physics and chemistry of nonthermal plasmas and their applications in materials science for physicists and chemists. The properties and characteristics of plasmas, elementary (collision) processes in the gas phase, plasma surface interactions, gas discharge plasmas and technical plasma sources, atmospheric plasmas, plasma diagnostics, polymers and plasmas, plasma polymerization, post-plasma processes, plasma, and wet-chemical processing, plasma-induced generation of functional groups, and the chemical reactions on these groups along with a few exemplary applications are discussed in this comprehensive but condensed state-of-the-art book on plasma chemistry and its dependence on plasma physics. While plasma physics, plasma chemistry, and polymer science are often handled separately, the aim of the authors is to harmoniously join the physics and chemistry of low-pressure and atmospheric-pressure plasmas with polymer surface chemistry and polymerization and to compare such chemistry with classic chemistry. Readers will find in these chapters Interaction of plasma physics and chemistry in plasmas and at the surface of polymers; Explanation and interpretation of physical and chemical mechanisms on plasma polymerization and polymer surface modification; Introduction of modern techniques in plasma diagnostics, surface analysis of solids, and special behavior of polymers on exposure to plasmas; Discussion of the conflict of energy-rich plasma species with permanent energy supply and the much lower binding energies in polymers and alternatives to avoid random polymer decomposition Technical applications such as adhesion, cleaning, wettability, textile modification, coatings, films, etc. New perspectives are explained about how to use selective and mild processes to allow post-plasma chemistry on non-degraded polymer surfaces. Audience Physicists, polymer chemists, materials scientists, industrial engineers in biomedicine, coatings, printing, etc.
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
Book Synopsis Handbook of Plasma Processing Technology by : Stephen M. Rossnagel
Download or read book Handbook of Plasma Processing Technology written by Stephen M. Rossnagel and published by William Andrew. This book was released on 1990 with total page 523 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
Book Synopsis Handbook of Plasma Processing Technology by : Arthur H Landrock
Download or read book Handbook of Plasma Processing Technology written by Arthur H Landrock and published by William Andrew. This book was released on 1990 with total page 523 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
This book is a primer on the interplay between plasma and materials in a fusion reactor, so-called plasma–materials interactions (PMIs), highlighting materials and their influence on plasma through PMI. It aims to demonstrate that a plasma-facing surface (PFS) responds actively to fusion plasma and that the clarifying nature of PFS is indispensable to understanding the influence of PFS on plasma. It describes the modern insight into PMI, namely, relevant feedback to plasma performance from plasma-facing material (PFM) on changes in a material surface by plasma power load by radiation and particles, contrary to a conventional view that unilateral influence from plasma on PFM is dominant in PMI. There are many books and reviews on PMI in the context of plasma physics, that is, how plasma or plasma confinement works in PMI. By contrast, this book features a materials aspect in PMI focusing on changes caused by heat and particle load from plasma: how PFMs are changed by plasma exposure and then, accordingly, how the changed PFM interacts with plasma.
Book Synopsis Plasma-Material Interactions in a Controlled Fusion Reactor by : Tetsuo Tanabe
Download or read book Plasma-Material Interactions in a Controlled Fusion Reactor written by Tetsuo Tanabe and published by Springer. This book was released on 2022-03-09 with total page 207 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a primer on the interplay between plasma and materials in a fusion reactor, so-called plasma–materials interactions (PMIs), highlighting materials and their influence on plasma through PMI. It aims to demonstrate that a plasma-facing surface (PFS) responds actively to fusion plasma and that the clarifying nature of PFS is indispensable to understanding the influence of PFS on plasma. It describes the modern insight into PMI, namely, relevant feedback to plasma performance from plasma-facing material (PFM) on changes in a material surface by plasma power load by radiation and particles, contrary to a conventional view that unilateral influence from plasma on PFM is dominant in PMI. There are many books and reviews on PMI in the context of plasma physics, that is, how plasma or plasma confinement works in PMI. By contrast, this book features a materials aspect in PMI focusing on changes caused by heat and particle load from plasma: how PFMs are changed by plasma exposure and then, accordingly, how the changed PFM interacts with plasma.
Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
Book Synopsis Handbook of Advanced Plasma Processing Techniques by : R.J. Shul
Download or read book Handbook of Advanced Plasma Processing Techniques written by R.J. Shul and published by Springer Science & Business Media. This book was released on 2011-06-28 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
The recent development of large fusion devices achieving near energy break-even scientifically proves the viability of fusion as an energy source. The challenge now facing fusion researchers is surmounting engineering obstacles to make fusion energy practical. Physical Processes of the Interaction of Fusion Plasmas with Solids discusses problems associated with plasma-surface interactions which represent a key issue in achieving engineering as opposed to scientific success. Unlike previous books on the subject, this text is directly related to the broad range of plasma-surface interactions problems encountered in fusion devices. Physical Processes of the Interaction of Fusion Plasmas with Solids provides the specialized international fusion community with a resource that covers the interesting new developments that have occurred with the advent of the larger fusion plasmadevices that have demonstrated near break-even energy. This book addresses problems that are useful for design and fabrication of such devices. The edge plasma Physical sputtering and radiation-enhanced sublimation Chemical erosion Electron emission from solids Control of plasma-surface interactions by thin films Thermal stability Radiation damage in metallic structural materials Radiation damage in carbon materials
Book Synopsis Physical Processes of the Interaction of Fusion Plasmas with Solids by : Wolfgang O. Hofer
Download or read book Physical Processes of the Interaction of Fusion Plasmas with Solids written by Wolfgang O. Hofer and published by . This book was released on 1996 with total page 414 pages. Available in PDF, EPUB and Kindle. Book excerpt: The recent development of large fusion devices achieving near energy break-even scientifically proves the viability of fusion as an energy source. The challenge now facing fusion researchers is surmounting engineering obstacles to make fusion energy practical. Physical Processes of the Interaction of Fusion Plasmas with Solids discusses problems associated with plasma-surface interactions which represent a key issue in achieving engineering as opposed to scientific success. Unlike previous books on the subject, this text is directly related to the broad range of plasma-surface interactions problems encountered in fusion devices. Physical Processes of the Interaction of Fusion Plasmas with Solids provides the specialized international fusion community with a resource that covers the interesting new developments that have occurred with the advent of the larger fusion plasmadevices that have demonstrated near break-even energy. This book addresses problems that are useful for design and fabrication of such devices. The edge plasma Physical sputtering and radiation-enhanced sublimation Chemical erosion Electron emission from solids Control of plasma-surface interactions by thin films Thermal stability Radiation damage in metallic structural materials Radiation damage in carbon materials
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Book Synopsis Plasma Processing of Semiconductors by : Paul Williams
Download or read book Plasma Processing of Semiconductors written by Paul Williams and published by Springer Science & Business Media. This book was released on 1997-05-31 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
